Semiconductor Equipment, Eight Inch Systems, High Vacuum Systems, Veeco Profiler, Furnaces, Vacuum Pumps, Etc.
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Veeco Profiler System
This system was received in August - October, 2001 brand new and has only been used for training purposes when initially received ( a total of about 2 hours). Total purchase cost was $142,374.29. Due to a change in product processing, it has never been used outside of training.
Profiler System Details:
- NT-3300 Profiler system with computer
- 8 inch auto XY with 5 urn encoder/autoII
- 0.5X field of view lens
- 2.0X field of view lens
- Quadruple turret motorized operation, position sensing
- IX-10 interferometric objective
- 10 micron step height standard
- Wafer vacuum chuck, 4 inch - 8 inch
- Vacuum switch box
Please click on the stamp images below to see the various system views.
| View 1
| View 2
| View 3
| View 4
| View 5
| View 6
| View 7
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Won't last!!! Make reasonable offer!!!
If interested please click here.
Note: All products are subject to availability at time and date of inquiry.
Eight (8”) Semiconductor Equipment, Refurbished KLA/TENCOR Systems, & Parts
All equipment listed below are sold “as-is”, “where-is” basis and are subject to prior sale or availability at date of inquiry.
| Item
| Manufacturer
| Model
| Description
| Condition
| Qty
| Price Each, US$
|
| 1
| Asyst
| ARM 2200-V1315
| SMIF Loader
| New, never used
| 25
| Reasonable Offers
|
| 2
| Asyst
| ARM 220-V1316
| SMIF Loader
| New, never used
| 25
| Reasonable Offers
|
| 3
| Asyst
| MSC 6610
| MSC Box
| New, never used
| 25
| Reasonable Offers
|
| 4
| AG
| 8108
| 8108 with multiple 8800 upgrades
| Good
| 2
| Please call.
|
| 5
| ASML
| ASML 60
| |
Good
| 2
| Please call.
|
| 6
| ASML
| ASML 80
| |
Good
| 4
| Please call.
|
| 7
| Genus
| 8720 W CVD
| Tungsten Deposition
| Good
| 5
| Please call.
|
| 8
| Kensington
| Autoscope
| Metrology
| Good
| 3
| Please call.
|
| 9
| KLA/Tencor
| FT 650
| Film Thickness
| Good
| 2
| Please call.
|
| 10
| KLA/Tencor
| SFS 7700
| Pattern Inspection System
| Good
| 2
| Please call.
|
| 11
| LAM
| 4608
| Metal RIE
| Good
| 6
| Please call.
|
| 12
| AME
| 5000 CVD
| .03 dep/.01 etch
| Good
| 5
| Please call.
|
| 13
| Neslab
| RTE-134A MP
| Pyro Chiller
| Good
| 1
| Reasonable Offer
|
| 14
| Neslab
| |
Heat Exchanger
| Good
| 1
| Reasonable Offer
|
| 15
| SVG
| SVG 90
| Track
| Good
| 4
| Please call.
|
| 16
| SVG
| VTR 7000
| Nitride
| Good
| 1
| Please call.
|
| 17
| Strasbaugh
| 6DSSP
| |
Good
| 5
| Please call.
|
| 18
| Strasbaugh
| 6DSSP
| In Operation
| Good
| 6
| Please call.
|
| 19
| Ultrapointe/KLA
| 1010
| Metrology
| Good
| 2
| Please call.
|
| 20
| Varian
| M2000
| .04 dep. / .01 etchback chamber
| Good
| 2
| Please call.
|
| 21
| Varian
| M2000
| Missing some parts
| Spare System
| 1
| Please call.
|
| 22
| KLA/Tencor
| 4500
| Metrology
| OEM Specs
| 1
| Please call.
|
| 23
| KLA/Tencor
| 6220
| Metrology
| OEM Specs
| 1
| Please call.
|
| 24
| KLA/Tencor
| 6420
| Metrology
| OEM Specs
| 1
| Please call.
|
| 25
| PMS
| 3600
| Metrology
| OEM Specs
| 1
| Please call.
|
| 26
| Cannon
| EX 4
| In clean room available for inspection
| Good
| 5
| |
| 27
| Cannon
| EX 5
| In clean room available for inspection
| Good
| 5
| |
| 28
| KLA/Tencor
| SP1
| Metrology, 1998
| Excellent
| 1
| Please call.
|
| 29
| KLA/Tencor
| SP1-TB1
| Metrology, 2001, brand new in crate
| Never uncrated
| 1
| Please call.
|
| 30
| KLA/Tencor
| 6420
| Metrology / Refurbished
| OEM Specs
| 1
| Please call.
|
| 31
| KLA/Tencor
| SP1
| Metrology, “as-is”
| Excellent
| 1
| Please call.
|
Note: Support and installation services for KLA/Tencor equipment are available and performed by factory trained Field Service Engineers. Please call or click here to email request for details.
R&D Semiconductor Equipment and More . . . For Sale!!!
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
Semiconductor Equipment and High Vacuum Systems, Pumps, Furnaces, and More Hot List
Furnaces or Thin Film Equipment
| Item
| Model/Description
| Qty
| Condition
|
| 1
| SVG 7000 TEOS System, 1993
| 1
| Excellent
|
| 2
| BTU Apogee +1 Oxide System
| 2
| New, In Crate
|
| 3
| Gemini II
| 1
| Rebuilt, No Generator
|
| 4
| Gemini II
| 1
| "As-Is", No Generator
|
| 5
| Gemini I
| 1
| "As-Is", Touch Screen, No Generator
|
| 6
| Gemini I
| 1
| "As-Is", No Generator
|
Mass Flow Controller Power Supply & Control Unit
| Item
| Manufacturer
| Model/Description
| Qty
| Condition
|
| 1
| Brooks Instruments
| 0152E
| 8
| Excellent
|
New Busch Vacuum Pumps
| Item
| Manufacturer
| Model/Description
| Qty
| Serial No.
| CFM
| Condition
|
| 1
| Busch
| BB0021, .9 KW, 13A, 110V, 1PH, 60 HZ
| 1
| C0019000142
| 21
| New, no box
|
| 2
| Busch
| BA0250, 7.5 KW, 220/380V, 28.4/16.4A, 3 PH, 60HZ
| 1
| PB03680101
| 250
| New in Box
|
Won't last. Call for highly attractive prices.
New Arrivals, 05/10/00
| Item
| Model/Description
| Manufacturer
| Qty
| Condition
|
| 1
| A30W/Dry Pump
| Ebara
| 1
| New
|
| 2
| D65BCS/WSU501 Pump Package
| Leybold
| 3
| Rebuilt
|
| 3
| D65BCS/WSU501 Pump Package w/ Controller
| Leybold
| 1
| Rebuilt
|
| 4
| M100S Dry Pump
| Leybold
| 1
| "As-Is" (Clean) or Rebuilt
|
| 5
| E250 Piston Pump
| Leybold
| 1
| Rebuilt
|
| 6
| DP80/EH250 Pump Package
| Edwards
| 4
| "As-Is" (Clean)
|
Wafer fab facility, semiconductor equipment, turbo, and cryo pumps:
Cryo Compressor, CTI Cryogenics
- Model: 9600
- Quantity: 2 Ea
- Condition: New
Cryo Pump, CTI Cryogenics
- Model: On-Board 10F
- P/N: 8116051G003
- S/N: RF9709128
- New, in plastic, in crate, with manual. Complete with:
- Roughing valve, TC gauge, On-Board control, and purge valve.
Edwards Rebuilt Dry Pumps, 6 Months Warranty:
- Model QDP40 . . . 4 Ea
- Model QDP40/QMB250 . . . 1 Ea
- Model QDP80 . . . 1 Ea
- Model QDP80/QMB250 . . . 1 Ea
- Please click on Dry Pump and tell us how to reach you and which unit you are interested in.
Turbo Pumps:
- Seiko-Seiki, Model STP H-1303CV2 . . . UNUSED.
- Seiko-Seiki, Model STPH 1000C, with controller, cables, and accessories. New, factory sealed.
- Alcatel, Model 1000C, new, with brand new controller and cables, not sealed or boxed.
- Please click on Turbo Pump and tell us how to reach you and which unit you are interested in.
Wafer Fab For Sale:
- 6" Wafer Fabrication running with 0.8 micron linewidth, capable of doing 20,000 wafer with fifteen masking steps.
Buyer's benefit or advantage: Seller is willing to buy back current product for one year with a possible low volume thereafter.
- Please click on 6" Wafer Fab and tell us how to reach you.
MRC Eclipse, Sputter System, Rebuilt
- Model: Pre-Star
- Serial No. 1031176
- Year Mfg: 1989
- Upgrade, 2/96: ENI SS RF generators, Soft-etch, onboard retrofit cryo diffuser ring, 8" cryo on loadlock, Ar purifier for system.
- Process Chambers: 1 Etch and 3 Sputters
- Hurry!!! System has never been used sinced purchased as rebuilt.
- Total Invoice Amount was over a million dollars, call immediately for the best price!!!
- You may click on MRC Eclipse and tell us how to reach you.
Varian Sputtering System
- Model: 3180
- Serial No.: 84340-257
- Wafer Size: 4"
- Major Components:
- DC Power Supply, 12KW, 3 Ea
- Fluke 1722B Instrument Controller
- MKS Type 250B Controller
- Eurotherm Heater Controllers, 3 Ea
- Varian Wise Thin Film Monitor
- HP 3438A Multimeter Film Thickness Monitor
- Varian Wafer Process Controller
- Varian Wafer Loader Controller
- Varian Interlock & Control Chassis
- Varian Conmag P/S Remote Monitor
- Varian Vacuum System Controller
- Varian 845 Vacuum Ionization Gauge
- Varian RF Matching Controller
- Varian Cassette Motor Controller
- CTI Cryo On-Board Cryo Pump with Compressor
- Leybold, D-30 Mechanical Pump
- Hurry!!! Call for Price. Won't Last!!!
- You may click on Varian 3180 and tell us how to reach you.
Applied Materials Etch System
- Precision 5000 Mark II Etch
- MxP Mainfram Etch System
- Precision 5000 Mark II Etch MxP System Mainframe
- Two Polysilicon/Polycide Etch UniChambers
- Polycide MxP Etch Process Kit
- Voltage/Frequency: 208 VAC, 60 hZ
- Hurry!!! Call for price and more details.
- You may click on Applied P-5000 and tell us how to reach you.
New Hot List
Tektronix, Metallic TDR, Model 1502C, New, 1 Ea
Turbo Pump, Seiko-Seiki, Model STP H1303CV2, New, 1 Ea
Vacuum Pump, Model iQDP80, Rebuilt, 1 Ea.
Vacuum Pump, Ebara, 65X40ERDM5M-NJ, 2 Ea.
Cryo Compressor, CTI, Model 9600, 2 Ea
Power Supply, ENI, Model OEM28B, Rebuilt, 1 Ea.
Chiller, AEC:
- Model: NXGA-5Q S/N: 92J0452
- Voltage: 460/3/60
- Heat Transfer Fluid: 70% H2O, 30% Antifreeze
- Refrigerant: R-22-10#
- Minimum Temp: 20 deg F
Wafer Aligner, Canon 501FA, 4" setup, 3 Ea.
Leybold Sputtering Systems, 3 Ea:
Model BL550, 15 inch aluminum target, 2 systems are equipped with Model 450 turbo pumps, one system is equipped with cryo pump, all systems run RF Etch and Sputtering processes.
Nikon 8" Stepper, G-Line . . . Details upon request.
Nikon 8" Stepper, I-Line . . . Details upon request.
MRC, Eclipse, E350 . . . Details upon request.
Implanter, E1000 . . . Details upon request.
AME 7810, 7800, 7600. . . Available for buyer's configuration.
EPI Systems, Gemini III, RP, One Sided
AME 7600, 4", Running, As-Is . . . \$20K
AME-7600, Completely Rebuilt . . . \$228,000.00
- Includes installation and start-up. Buyer's responsibility . . . Complete setup of facilities.
- Delivery . . . . . 2-3 weeks URO
- Terms . . . . . . . Call for details
- Warranty:
1 year mechanical
6 months electrical
- You may click on Rebuilt AME-7600 and tell us how to reach you.
Related Equipment:
- Balancing and Test Equipment, Schinck Vibrotest 41. Used only once for training demo.
- Helium Leak Detector
- Orbital Welding System
- Digital Mass Flow Controller Calibration System and over 2,000 MFC's. Buy this with a helium leak detector, you can have a very profitable business. Contact us for details.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
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OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
Email: webmaster@semicontechpro.8m.com
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C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System |
C11: R&D Vacuum Systems and More Semiconductor Equipment |
C12: Semiconductor and High Tech Equipment |
C13: Semiconductor Equipment for Eight Inch (8”) Wafer Fab | Mass Flow Controller List | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Ion Implanter Parts & Services | Precision Fluid Pumps | Applied Materials Parts List | Equipment List | Lam Systems Parts List |Tegal Systems Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Advertise Worldwide Online
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Semiconductor Equipment Resource Center
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