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C1: Semiconductor Equipment Support List

C2: Semiconductor Equipment List

C2A: Semiconductor Equipment List

C2B: Semiconductor Equipment List

C2C: Semiconductor Equipment List

Vacuum Pump List

C3: More Vacuum Pumps

C5B: New Vacuum Pumps

C4: Semiconductor Equipment, High Vacuum

C5A: Rebuilt He Leak Detectors

C6A: More Semiconductor Equipment

C6B: Furnaces & Film Measurement

C6C: Implanters, Sputterers, Steppers, Etc.

C6D: Wafer Track, Inspection, Transfer Systems, & More

C7A: Plasma Systems, Rebuilt

C8: Vacuum Packaging Equipment

C9: Semiconductor Equipment, Used, Surplus

C10: Special Vacuum System

C11: R&D Vacuum Systems and More Semiconductor Equipment

C12: Semiconductor and High Tech Equipment

C13: Semiconductor Equipment for Eight Inch (8”) Wafer Fab

Mass Flow Controller List

Mass Flow Controller List, GR-2

Mass Flow Controller List, GR-3

MFC Related Equipment

Applied Materials Parts List

Lam Systems Parts List

Tegal Systems Parts List

Varian Parts List

Test Systems & More Semi Equipment

Ion Implanter Parts & Services

Precision Fluid Pumps

Equipment List

Microscope and Accessory List

New Parts List

Related Equipment List

Online Resources

Online Affiliates

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Semiconductor Equipment: Vacuum Systems, Pumps, Blower, and Power Supplies


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BUY - SELL - LEASE - TRADE - SERVICE - PROCESS


The following are notes from the list provider:

    Equipment Sales
    • We completely rebuild systems, and offer them with a 90 day warranty. We also do special modifications on these systems. We can configure many of these systems to your specifications. A complete source inspection at our facility is possible. Please see the following lists of our current inventory.
    Equipment Purchasing/Trade
    • We will also buy your equipment, and take your systems in trade.
    Equipment Spare Parts
    • We carry many spare parts for the systems listed below, specifically Branson/IPC, Drytek, Gasonics, LFE, Technics, Tegal, etc. Also, we have vacuum related products and fluids, and RF Power Tubes.
    Equipment Repair/Service
    • We will completely rebuild your system at our facility, or service your system at your location. Our service rate plus travel expenses.
    Plasma Processing
    • We have equipment installed at our facility to do surface treating and cleaning of your parts. This service can usually be performed within 24 hours.


Note:

  • All items included in the following table and list are subject to prior sale or availability upon time and date of inquiry.

Vacuum Systems

Item Qty Description
1 1 Ea CPA Model 9900 DC Sputter Deposition System, w/ 4 ea ERA 5 KW DC sputtering power supplies, 2 ea CTI 8 and 1 ea CTI 10 cryo pumps, w/ pumps and chillers.
2 1 Ea GSI R&D deposition system, for AMSi, amnual valving, Sierra mass flow controllers, MKS baratron controller, GP 307 vacuum gauge, 2 ea Balzers Model TPU 330 turbo pumps/TCP 310 controllers, ENI ACG-3 RF P/S, Leybold pump/blower package.
3 1 Ea Leybold Model VZK A550 sputtering machine, w/ Huttinger Model IS 6 10KW RF Power supply, spare RF Generator.
4 1 Ea Innotech sputterer customized: 486 industrial computer tied to PLC, CTI 8 cryo w/ compressor, RF Services automatch networks w/ controllers, approx 28" dia SS chamber, RGA port, Henry 10KW RF Power Supply, Advanced Energy Model RFX 1250 P/S, spare RF Generator.
5 1 Ea Leybold Heraeus Model Ultratest F Leak Detector, automatic operation, diffusion pump.
6 1 Ea NRC 3317 Sputtering System, MRC S-3007 RF P/S, 1.25 KW, 6" target w/ sputter etch station, manual valving, VHS-6" DP with Welch 1397 mechanical pump.


Vacuum Pumps and Blowers

Item Qty Manufacturer Model Capacity, CFM/LPM
1 2 Alcatel 2030C 17.7/500
2 1 Alcatel 2033C 27/765
3 5 Alcatel ZT2063C 50/1420
4 1 Edwards E2M1 N/A
5 2 Edwards E2M40 30/845
6 1 Edwards E2M80 57/1613
7 1 Edwards EH250 190/5367
8 1 Leybold D2 2.2/62
9 1 Leybold D8 7.0/198
10 4 Leybold D16 14.1/400
11 2 Leybold D16BCS 11.6/328
12 1 Leybold D30AC 26.8/760
13 2 Leybold D30AC, Fomblin Prep 26.8/760
14 1 Leybold D40BCS 28.3/920
15 2 Leybold S60 N/A
16 2 Leybold D60 36.7/1039
17 2 Leybold D90AC 55/1556


Vacuum Pump/Blower Packages

Item Qty Manufacturer Model Capacity, CFM/LPM
1 3 Edwards E2M40/EH250, New 220/6196
2 1 Leybold D40BCS/Blower 28.3/920
3 1 Edwards Edwards/EH 1200 780 CFM
4 1 Leybold D30AC/WA250 179 CFM


RF Power Supplies

Item Manufacturer Model Capacity, Watts Frequence
1 Advanced Energy PE-1000SG 1250 25-100 KHz
2 Advanced Energy RFX1250 1250 13.56 MHz
3 Advanced Energy PDW2200 2200 N/A
4 Advanced Energy RFG1250 N/A N/A
5 Branson PM 119 500 13.56 MHz
6 Branson PM 118 500 13.56 MHz
7 Branson PM 112 1500 13.56 MHz
8 Branson PM 122 1500 13.56 MHz
9 Branson PM 129 500 13.56 MHz
10 Branson PM 332 1000 13.56 MHz
11 Comdel CPS-1001 1000 13.56 MHz
12 ENI HF1 2000 13.56 MHz
13 ENI AGC-10T 1000 13.56 MHz
14 ENI OEM-6 1000 13.56 MHz
15 ENI OEM-12 1250 13.56 MHz
16 ENI Matchworks 25D 3000W max 13.56 MHz


Matching Network

Item Manufacturer Model Capacity, Watts Frequence
1 LFE SA 40C 500W 13.56 MHz
2 Plasma Therm HFS3000D 3000W 13.56 MHz
3 Plasma Therm HFS10000 10000W 13.56 MHz
4 RF Plasma Prod. RF 50S 5000W 13.56 MHz
5 RF Plasma Prod HFS500E 500W 13.56 MHz
6 Tegal N/A 300W 13.56 MHz
7 Bird Dummy Load, 3 Ea 1500W N/A


need Mass Flow Controllers, please click here.

If you need Vacuum Pumps, please click here.


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Please contact us at:

OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293

Email: webmaster@semicontechpro.8m.com


C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: R&D Vacuum Systems and More Semiconductor Equipment | C12: Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8”) Wafer Fab | Mass Flow Controller List | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Ion Implanter Parts & Services | Precision Fluid Pumps | Applied Materials Parts List | Equipment List | Lam Systems Parts List |Tegal Systems Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Hot List Sale | Advertise Worldwide Online


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