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Vacuum Systems and Semiconductor Equipment: Wafer Track, Inspection, Transfer, Sputter, Etcher Systems, and Miscellaneous Equipment - C6D
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Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
C6A: Wafer Fabrication or Semiconductor Equipment List |
| Item No. | Equipment | Model | Vendor | Asset No. | S/L No. | Date Acquired | Qty |
| 176 | T-Bawl System | G-1 | TEL | D9Z930609 | 360123 | 19930831 | 1 |
| 177 | T-Bawl System | G-1 | TEL | D9Z930610 | 360124 | 19930831 | 1 |
| 178 | T-Bawl System | G-1 | TEL | D9Z930611 | 360125 | 19930831 | 1 |
| 179 | T-Bawl System | G-1 | TEL | D9Z930612 | 360126 | 19930831 | 1 |
| 180 | Track (SC71) | 88 Series | SVG | D9Z910960 | 17967 | 19911201 | 1 |
| 181 | Track (SD71) | 88 Series | SVG | D9Z910968 | 18010 | 19911201 | 1 |
| 182 | Track (SC72) | 88 Series | SVG | D9Z910959 | 17963 (Bad) | 19911201 | 1 |
| 183 | Track (2XC61, 62) | 88 Series | SVG | D9Z911473 | 99-43667-01 (Bad) | 19911201 | 1 |
| 184 | Track (2XC63, 64) | 88 Series | SVG | D9Z911474 | 99-43667-02 | 19911201 | 1 |
| 185 | Track (2TC, TD51-52) | Mark-2 | TEL | D9Z890092 | 281028-9 | 19890630 | 2 |
| 186 | Track (2TC71, 72) | Mark-2 | TEL | D9Z890567 | 291140 | 19891130 | 1 |
| 187 | Track (2TC81, 82) | Mark-2 | TEL | D9Z870396 | 26635 | 19871031 | 1 |
| 188 | Track (2TD71, 72) | Mark-2 | TEL | D9Z890568 | 291141 | 19891130 | 1 |
| 189 | Track (2TD81, 82) | Mark-2 | TEL | D9Z870395 | 26637 | 19871031 | 1 |
| 190 | Track (2TC31) | Mark-V | TEL | D9A940331 | 513906 | 19940330 | 1 |
| 191 | Track (2TC32) | Mark-V | TEL | D9A940332 | 513918 | 19940330 | 1 |
| 192 | Track (2TD61) | Mark-V | TEL | D9A940298 | MD513911 | 19940113 | 1 |
| 193 | Track (DC31) | SDW-629BV | DNS | D9A911248 | 89700-8265 | 19911201 | 1 |
| 194 | Track (DD21) | SDW-629BV | DNS | D9Z911253 | 89700-8270 | 19911201 | 1 |
| 195 | Track (2XD61, 62) | SDW-636 | DNS | D9Z930046 | 52700-1593 | 19930331 | 1 |
| 196 | Tube Stacker | 2700*1800*600 | Korean | D9Z930587 | N/A | 19930817 | 1 |
| 197 | Tube Washer (#A1) | 1500*2400*1020 | Korean | D9Z931022 | N/A | 19931228 | 1 |
| 198 | Tube Washer (#B1) | 1500*2400*1000 | Korean | D9Z931099 | N/A | 19931228 | 1 |
| 199 | Tube Washer (#B2) | 1500*2400*1000 | Korean | D9Z930814 | N/A | 19931228 | 1 |
| 200 | Tube Washer (#B3) | 1500*2400*1000 | Korean | D9Z930815 | N/A | 19931228 | 1 |
| 201 | Tube Washer (#B4) | 1500*2400*1000 | Korean | D9Z930816 | N/A | 19931228 | 1 |
| 202 | Tube Washer (#B5) | 1500*2400*1000 | Korean | D9Z930817 | N/A | 19931228 | 1 |
| 203 | Ultra Station | Ultra-3 | Irvine | D9Z931077 | 8143 | 19931125 | 1 |
| 204 | W/F System | Fab-2 | Korean | D9Z960272 | N/A | 19960530 | 1 |
| 205 | W/F Inspection (2KL01) | KLA-2110 | KLA | D9Z920228 | 313 | 19921201 | 1 |
| 206 | W/F Inspection (2KL91) | KLA-2550 | KLA | D9Z930241 | 370 | 19930601 | 1 |
| 207 | W/F Inspection | TPC-8500M | INSPX | D9Z920333 | 9201003 | 19921201 | 1 |
| 208 | W/F Inspection | TPC-8500M | INSPX | D9Z920330 | 9301001 | 19930630 | 1 |
| 209 | W/F Inspection (2IN02) | TPC-8500M | INSPX | D9B940187 | 9311002 | 19940101 | 1 |
| 210 | W/F Inspection (2IN01) | TPC-8500M | INSPX | D9Z930613 | 9209001 | 19930831 | 1 |
| 211 | W/F Transfer | Type G1 | ASQ | D9Z960102 | 7.0415E+11 | 19960318 | 1 |
| 212 | W/F Transfer | AT31-6-25/50 | ASQ | D9Z960069 | 1445 | 19960210 | 1 |
| 213 | W/F Transfer | ET11-6910C-X-O | MGI | D9Z930793 | 190064 | 19931224 | 1 |
| 214 | W/F Transfer (2TR04) | AT-11E-6-25/50 | ASQ | D9Z920222 | 1305 | 19921201 | 1 |
| 215 | W/F Transfer (2TR07) | WTF-2000 | Korean | D9Z930704 | 224465 | 19931030 | 1 |
| 216 | W/F Transfer (2TR10) | AT-11E-6-25 | ASQ | D9Z930138 | 1343 | 19930426 | 1 |
| 217 | W/F Transfer (ASQ) | AT 1E-625 | ASQ | D9Z920441 | 1223 | 19921201 | 1 |
| 218 | W/F Transfer (ATUO) | Q19755 | N/A | D9Z851103 | WT-04 | 19860106 | 1 |
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