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C1: Semiconductor Equipment Support List

C2: Semiconductor Equipment List

C2A: Semiconductor Equipment List

C2B: Semiconductor Equipment List

C2C: Semiconductor Equipment List

Vacuum Pump List

C3: More Vacuum Pumps

C5B: New Vacuum Pumps

C4: Semiconductor Equipment, High Vacuum

C5A: Rebuilt He Leak Detectors

C6A: More Semiconductor Equipment

C6C: Implanters, Sputterers, Steppers, Etc.

C6D: Wafer Track, Inspection, Transfer Systems, & More

C7A: Plasma Systems, Rebuilt

C7B: Vacuum, Systems, Pumps Power Supplies

C8: Vacuum Packaging Equipment

C9: Semiconductor Equipment, Used, Surplus

C10: Special Vacuum System

C11: R&D Vacuum Systems and More Semiconductor Equipment

C12: Semiconductor and High Tech Equipment

C13: Semiconductor Equipment for Eight Inch (8”) Wafer Fab

Mass Flow Controller List

Mass Flow Controller List, GR-2

Mass Flow Controller List, GR-3

MFC Related Equipment

Applied Materials Parts List

Lam Systems Parts List

Tegal Systems Parts List

Varian Parts List

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Ion Implanter Parts & Services

Precision Fluid Pumps

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Semiconductor Equipment: Furnaces, Film Thickness Measurement, Monitoring System, Etc.

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Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.

Item Equipment Model Notes Voltage/Current Dimensions
1 SK Vapor Dryer 51028 IPA Dryer 240V/70A 45W X 24D X 100H
2 AEP Stripper UC-7550 Flat Panel Stripper 208V/200A 74W X 50D 94H
3 O3 Detector IN 2000-3 Ozone Monitor 120V/1.5A N/A
4 Steag Wet Etch FPD-400 Wet Etch with Robot 208V/60A 71W X 51L X 65H
5 AKT RIE 1600-ETCH 2 Etch Chambers 208V/240A Cluster Tool
6 AKT PVD 1600-PVD 2 Sputter Chambers 208V/320A Cluster Tool
7 Steag Coater FPD 400 Resist Coater/Developer 208V/175A 115W X 82D X 73H
8 Tamarack T-300 Photo Lithography Tool 208V/15A 67W X 59D X 103H


Semiconductor Equipment: Furnaces, Monitoring System, and Film Thickness Measurement - C6B
Page 2

Thin Film Furnaces, Monitoring and Control Systems, Thickness Measurement, & Gas Analyzer


Item No. Equipment Model Vendor Asset No. S/L No. Date Acquired Qty
54 Film Thickness (2SM01) SM150 Prometrix D9H910365 9108-SM 19911030 1
55 Furnace Monitoring System Computer Jon Goldman D9B940562   19941207 1
56 Furnace Control System Thermco CSW Thermco D9Z920509 SUP9100046 19921201 1
57 Furnace ((2KA98) BDF-4 Kokusai D9Z930287 T1DC1-02020 199300601 1
58 Furnace (2K031) DD-802V Kokusai D9Z920511 T2DD1-10219-3 19921201 1
59 Furnace (2K032) DD-802V Kokusai D9Z920512 T2DD1-10219-6 19921201 1
60 Furnace (2K043) DD-802V Kokusai D9Z920513 T2DD1-10219-1 19921201 1
61 Furnace (2K083) DD-802V Kokusai D9Z920516 T2DD1-10219-2 19921201 1
62 Furnace (2K084) DD-802V Kokusai D9Z920514 T2DD1-10219-4 19921201 1
63 Furnace (2K096) DD-802V Kokusai D9Z920515 T2DD1-10219-5 19921201 1
64 Furnace (2KA95) DD-803V Kokusai D9Z920510 T2DD1-10217 19921201 1
65 Furnace (2KA97) DD-803V Kokusai D9Z920281 T2DD1-10182 19921201 1
66 Furnace (2KC02) DJ-802V Kokusai D9A960098 DC1-01435-1 19960819 1
67 Furnace (2KC01) DJ-802V Kokusai D9A940302 T1DC2-02020 19940101 1
68 Furnace (2KD81) DJ-802V Kokusai D9Z911537 T2DD1-10167-2 19911201 1
69 Furnace (2KD82) DJ-802V Kokusai D9Z911538 T2DD1-10167-1 19911201 1
70 Furnace (2KN44) DJ-802V Kokusai D9Z920517 T2DC2-10216 19921201 1
71 Furnace (2KP51) DJ-802V Kokusai D9Z910611 T2DC2-10141-1 19911129 1
72 Furnace (2KP52) DJ-802V Kokusai D9Z910668 T2DC2-10141-2 19911129 1
73 Furnace (2KT62) DJ-802V Kokusai D9Z920327 T2DC2-10207 19921201 1
74 Furnace (2KT91) DJ-802V Kokusai D9Z910670 B2DC2-10092-1 19911129 1
75 Furnace (2KT92) DJ-802V Kokusai D9Z910613 B2DC2-10092-2 19911129 1
76 Furnace (2KT93) DJ-802V Kokusai D9Z910610 B2DC2-10140-2 19911129 1
77 Furnace (2KT94) DJ-802V Kokusai D9Z910665 B2DC2-10140-1 19911129 1
78 Furnace (2VN21) IW-6C Kokusai D9Z930222 VF325006 19930601 1
79 Furnace (2KP65) DJ-803 Kokusai D9Z930286 T1DC2-01880 19930601 1
80 Furnace (2TT86) IW-6C TEL D9AD40247 9+E83Z-5012 19940115 1
81 Furnace (2VN11) IW-6C TEL D9Z930216 VF325007 19930601 1
82 Furnace (2VN22) IW-6C TEL D9Z930221 VF325005 19930601 1
83 Furnace (2VN23) IW-6C TEL D9Z930218 VF325002 19930601 1
84 Furnace (2VP12) IW-6C TEL D9Z930219 VF325003 19930601 1
85 Furnace (2VP14) IW-6C TEL D9Z930220 VF325004 19930601 1
86 Furnace (2VP15) IW-6C TEL D9Z930217 VF325001 19930601 1
87 Furnace (2VF13) IW-6D TEL D9Z930223 VF285066 19930601 1
88 Furnace (2VF25) IW-6D TEL D9Z930224 VF285067 19930601 1
89 Furnace (2FN75-78) UL-2604-10H TEL D9Z930145 320006 19930427 1
90 Furnace (2HF11-14) UL-2604-10H TEL D9Z930254 320004 19930601 1
91 Furnace (2HF21-24) UL-2604-10H TEL D9Z930213 320005 19930601 1
92 Furnace (2FN05-06) UL-2604-10HT TEL D9Z890660 960114 19891230 1
93 Furnace (2FN11-14) UL-2604-10HT TEL D9Z880512 880082 19890131 1
94 Furnace (2FN21-24) UL-2604-10HT TEL D9Z910570 170051 19911029 1
95 Furnace (2FN25-28) UL-2604-10HT TEL D9Z890659 960115 19891230 1
96 Furnace (2HT15-18) UL-2604-10L TEL D9Z930215 320003 19930601 1
97 Furnace (2LP01-04) UL-2604-10LT TEL D9Z890661 960116 19891230 1
98 Furnace (2LP15-18) UL-2604-10LT TEL D9Z880513 880083 19890131 1
99 Furnace (2VD17) VDF-615S TEL D9Z930031 VF285072 19930331 2
100 Furnace (2TF87) VDF-616S TEL D9Z940246 93Y5002 19940115 1
101 Furnace (2CU03) VF-4000B Koyo Lindberg D9Z960197 Q9604-1927 19961128 1
102 Furnace (2CU01) VF-4000B Koyo Lindberg D9Z930037 Q9205-1730 19930331 1
103 Furnace (2CU02) VF-4000B Koyo Lindberg D9Z930607 Q9305-1764 19930831 1
104 Furnace (2T045) VTR-7000 Thermco D9Z920506 V7-048 19921201 1
105 Furnace (2T046) VTR-7000 Thermco D9Z920504 V7-046 19921201 1
106 Furnace (2T053) VTR-7000 Thermco D9Z920503 V7-045 19921201 1
107 Furnace (2T054) VTR-7000 Thermco D9Z920505 V7-047 19921201 1
108 Furnace (2T063) VTR-7000 Thermco D9Z920508 V7-050 19921201 1
109 Furnace (2T064) VTR-7000 Thermco D9Z920507 V7-049 19921201 1
110 Gas Analyzer HAL Quadropole Hiden Analytical D9H910329 216470 19911025 1

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C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: R&D Vacuum Systems and More Semiconductor Equipment | C12: Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8”) Wafer Fab | Mass Flow Controller List | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Ion Implanter Parts & Services | Precision Fluid Pumps | Applied Materials Parts List | Equipment List | Lam Systems Parts List |Tegal Systems Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Hot List Sale | Advertise Worldwide Online


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