Wafer Fab, High Vacuum Systems, R & D Semiconductor Equipment
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New Busch Vacuum Pumps
| Item
| Manufacturer
| Model/Description
| Qty
| Serial No.
| CFM
| Condition
|
| 1
| Busch
| BB0021, .9 KW, 13A, 110V, 1PH, 60 HZ
| 1
| C0019000142
| 21
| New, no box
|
| 2
| Busch
| BA0250, 7.5 KW, 220/380V, 28.4/16.4A, 3 PH, 60HZ
| 1
| PB03680101
| 250
| New in Box
|
Won't last. Call for highly attractive prices.
Turbo Pump, Brand New
- Seiko-Seiki, Model STPH 1000C, with controller, cables, and accessories, still factory sealed.
- Hurry!!! Won't last!!!
Wafer Fab For Sale:
- 6" Wafer Fabrication running with 0.8 micron linewidth
- Capable of doing 20,000 wafer with fifteen masking steps
- Buyer's benefit or advantage: Seller is willing to buy back current product for one year with a possible low volume thereafter.
MRC Sputter System, Rebuilt
- Model: Pre-Star
- Serial No. 1031176
- Year Mfg: 1989
- Upgrade, 2/96: ENI SS RF generators, Soft-etch, onboard retrofit cryo diffuser ring, 8" cryo on loadlock, Ar purifier for system.
- Process Chambers: 1 Etch and 3 Sputters
- Hurry!!! System has never been used sinced purchased as rebuilt.
- Total Invoice Amount was over a million dollars, call immediately for the best price!!!
Varian Sputtering System
- Model: 3180
- Serial No.: 84340-257
- Wafer Size: 4"
- Major Components:
- DC Power Supply, 12KW, 3 Ea
- Fluke 1722B Instrument Controller
- MKS Type 250B Controller
- Eurotherm Heater Controllers, 3 Ea
- Varian Wise Thin Film Monitor
- HP 3438A Multimeter Film Thickness Monitor
- Varian Wafer Process Controller
- Varian Wafer Loader Controller
- Varian Interlock & Control Chassis
- Varian Conmag P/S Remote Monitor
- Varian Vacuum System Controller
- Varian 845 Vacuum Ionization Gauge
- Varian RF Matching Controller
- Varian Cassette Motor Controller
- CTI Cryo On-Board Cryo Pump with Compressor
- Leybold, D-30 Mechanical Pump
- Hurry!!! Call for Price. Won't Last!!!
Applied Materials Etch System
- Precision 5000 Mark II Etch
- MxP Mainfram Etch System
- Precision 5000 Mark II Etch MxP System Mainframe
- Two Polysilicon/Polycide Etch UniChambers
- Polycide MxP Etch Process Kit
- Voltage/Frequency: 208 VAC, 60 hZ
- Hurry!!! Call for price and more details.
ULVAC, Ceraus Z-1000 Titanium Nitride Sputtering System
- Operation Period: Less than 2 years
- urrent Wafer Size Setup: Six Inch (6")
- Condition: Excellent
- The "LUCKY" buyer takes all spares worth $$$$$$, so hurry!!!
Applied Materials, 8115 Oxide Etcher
- Condition: Excellent
- Current Wafer Setup Size: Six Inch, (6")
- Just came out from the wafer fab, complete.
Applied Materials, AME-7810 Epitaxy System
- Rebuilt to customer's specifications
- Site installation and startup available
R&D Semiconductor Equipment . . . For Sale!!!
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
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Tel: (408)259-1900 Fax: (408)259-1990
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C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System |
C11: R&D Vacuum Systems and More Semiconductor Equipment |
C12: Semiconductor and High Tech Equipment |
C13: Semiconductor Equipment for Eight Inch (8”) Wafer Fab | Mass Flow Controller List | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Ion Implanter Parts & Services | Precision Fluid Pumps | Applied Materials Parts List | Equipment List | Lam Systems Parts List |Tegal Systems Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Hot List Sale | Advertise Worldwide Online
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