Photo Lithography, Eight Inch Semiconductor Equipment, High Vacuum Systems, Etc
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Veeco Profiler System
This system was received in August - October, 2001 brand new and has only been used for training purposes when initially received ( a total of about 2 hours). Total purchase cost was $142,374.29. Due to a change in product processing, it has never been used outside of training.
Profiler System Details:
- NT-3300 Profiler system with computer
- 8 inch auto XY with 5 urn encoder/autoII
- 0.5X field of view lens
- 2.0X field of view lens
- Quadruple turret motorized operation, position sensing
- IX-10 interferometric objective
- 10 micron step height standard
- Wafer vacuum chuck, 4 inch - 8 inch
- Vacuum switch box
Please click on image below to see the photo.
Won't last!!! Make reasonable offer!!!
If interested, please fill form below, call or fax your inquiry.
Note: All products are subject to availability at time and date of inquiry.
Eight Inch (8") Semiconductor Equipment, Refurbished KLA/TENCOR Systems, & Parts
All equipment listed below are sold “as-is”, “where-is” basis and are subject to prior sale or availability at date of inquiry.
| Item
| Manufacturer
| Model
| Description
| Condition
| Qty
| Price Each, US$
|
| 1
| Asyst
| ARM 2200-V1315
| SMIF Loader
| New, never used
| 25
| Reasonable Offers
|
| 2
| Asyst
| ARM 220-V1316
| SMIF Loader
| New, never used
| 25
| Reasonable Offers
|
| 3
| Asyst
| MSC 6610
| MSC Box
| New, never used
| 25
| Reasonable Offers
|
| 4
| AG
| 8108
| 8108 with multiple 8800 upgrades
| Good
| 2
| Please call.
|
| 5
| ASML
| ASML 60
| |
Good
| 2
| Please call.
|
| 6
| ASML
| ASML 80
| |
Good
| 4
| Please call.
|
| 7
| Genus
| 8720 W CVD
| Tungsten Deposition
| Good
| 5
| Please call.
|
| 8
| Kensington
| Autoscope
| Metrology
| Good
| 3
| Please call.
|
| 9
| KLA/Tencor
| FT 650
| Film Thickness
| Good
| 2
| Please call.
|
| 10
| KLA/Tencor
| SFS 7700
| Pattern Inspection System
| Good
| 2
| Please call.
|
| 11
| LAM
| 4608
| Metal RIE
| Good
| 6
| Please call.
|
| 12
| AME
| 5000 CVD
| .03 dep/.01 etch
| Good
| 5
| Please call.
|
| 13
| Neslab
| RTE-134A MP
| Pyro Chiller
| Good
| 1
| Reasonable Offer
|
| 14
| Neslab
| |
Heat Exchanger
| Good
| 1
| Reasonable Offer
|
| 15
| SVG
| SVG 90
| Track
| Good
| 4
| Please call.
|
| 16
| SVG
| VTR 7000
| Nitride
| Good
| 1
| Please call.
|
| 17
| Strasbaugh
| 6DSSP
| |
Good
| 5
| Please call.
|
| 18
| Strasbaugh
| 6DSSP
| In Operation
| Good
| 6
| Please call.
|
| 19
| Ultrapointe/KLA
| 1010
| Metrology
| Good
| 2
| Please call.
|
| 20
| Varian
| M2000
| .04 dep. / .01 etchback chamber
| Good
| 2
| Please call.
|
| 21
| Varian
| M2000
| Missing some parts
| Spare System
| 1
| Please call.
|
| 22
| KLA/Tencor
| 4500
| Metrology
| OEM Specs
| 1
| Please call.
|
| 23
| KLA/Tencor
| 6220
| Metrology
| OEM Specs
| 1
| Please call.
|
| 24
| KLA/Tencor
| 6420
| Metrology
| OEM Specs
| 1
| Please call.
|
| 25
| PMS
| 3600
| Metrology
| OEM Specs
| 1
| Please call.
|
| 26
| Cannon
| EX 4
| In clean room available for inspection
| Good
| 5
| |
| 27
| Cannon
| EX 5
| In clean room available for inspection
| Good
| 5
| |
| 28
| KLA/Tencor
| SP1
| Metrology, 1998
| Excellent
| 1
| Please call.
|
| 29
| KLA/Tencor
| SP1-TB1
| Metrology, 2001, brand new in crate
| Never uncrated
| 1
| Please call.
|
| 30
| KLA/Tencor
| 6420
| Metrology / Refurbished
| OEM Specs
| 1
| Please call.
|
| 31
| KLA/Tencor
| SP1
| Metrology, “as-is”
| Excellent
| 1
| Please call.
|
Note: Support and installation services for KLA/Tencor equipment are available and performed by factory trained Field Service Engineers. Please call or click here to email request for details.
R&D Semiconductor Equipment . . . For Sale!!!
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
Semiconductor Equipment, High Vacuum Systems, and Photo Lithography - C2
| Item
| Manufacturer
| Brief Description
| Qty
|
| 1
| Applied Materials
| AME-8110/8130 Plasma Etcher
| 1 Ea
|
| 2
| Applied Materials
| AME-2100 APCVD Silox Reactor
| 1 Ea
|
| 3
| Applied Materials
| AMS-7600/7800 RP EPI REACTOR
| 1 Ea
|
| 4
| APT
| Etcher, Model 9145
| 1 Ea
|
| 5
| ASM
| SF-50, 8" System, Single Tube PECVD
| 1 Ea
|
| 6
| ASM
| Plasma III, LDM Dual Tube with PRI-5000 Loader
| 1 Ea
|
| 7
| BTU/BRUCE
| Furnace BDF4 with 7351C Controller
| 1 Ea
|
| 8
| Canon
| Aligner, PLA-501F/FA, 3", 4" and 5" Configuration
| 4 Ea
|
| 9
| Drytek
| DRIE-100 Plasma Etcher
| 4 Ea
|
| 10
| Eaton
| Nova 10-80 Hi-Current Implanter
| 1 Ea
|
| 11
| Electroglas
| 2001X Prober
| 1 Ea
|
| 12
| Fairchild
| Sentry-21 VLSI Tester
| 2 Ea
|
| 13
| Karl-Suss
| MA-56, Aligner, Setup for 3" Wafer
| 1 Ea
|
| 14
| Keithley
| S386, Omega Four-Point Probe
| 1 Ea
|
| 15
| Lam Research Corp.
| Lam 790 Etcher
| 1 Ea
|
| 16
| Lumonics
| Laser Wafer Mark III, Up to 8" Wafer
| 2 Ea
|
| 17
| Lumonics
| Laser Wafer Mark II, Up to 6" Wafer
| 1 Ea
|
| 18
| Micromanipulator
| MM 6000, Manual, Probe with 6" Chuck
| 1 Ea
|
| 19
| Micromanipulator
| MM 6200, Set up with HP-4145A, Computer and Printer
| 1 Ea
|
| 20
| Nanometrics
| Nanospec210/215/212 with Autoloader
| 1 Ea
|
| 21
| Nikon
| Optiphot 66, Microscope
| 1 Ea
|
| 22
| Pacific Western System
| PWS PII Prober
| 5 Ea
|
| 23
| Poly-Flow
| Vertical and Horizontal Tube Cleaner
| 1 Ea
|
| 24
| Prometrix
| SM200E, Film Thickness Mapping System
| 1 Ea
|
| 25
| Schumacher
| TCA Bubbler, New
| 1 Ea
|
| 26
| SVG
| 8800/8600/8100, Any Configuration
| 1 Ea
|
| 27
| Solitec
| 4110-C Four Head Manual Coater
| 1 Ea
|
| 28
| Tegal
| 900E/901E/903E Plasma Etcher
| 12 Ea
|
| 29
| Tegal
| 421 Plasma Stripper
| 1 Ea
|
| 30
| Tektronix
| 576 Curve Tracer, Calibrated
| 4 Ea
|
| 31
| Tencor
| AlphaStep 200, Calibrated
| 1 Ea
|
| 32
| Tencor
| 4500 Surfscan, Calibrated
| 1 Ea
|
| 33
| Tencor
| M-Gauge 300
| 1 Ea
|
| 34
| Thermco
| Furnace, 4300 with Analog Controller
| 3 Ea
|
| 35
| Thermco
| Furnace, 4300 with TMX 9002 Controller
| 2 Ea
|
| 36
| Ultratech
| Model 608, Mask Cleaner
| 1 Ea
|
| 37
| Varian
| 350D/CF-3000/CF$/DF4 Ion Implanter
| 1 Ea
|
| 38
| Varian
| 3190 Sputtering System, Set up for 4" Wafer
| 1 Ea
|
| 39
| Yield Engineering System
| YES-5 HMDS Oven
| 1 Ea
|
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C1: Semiconductor Equipment Support List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System |
C11: R&D Vacuum Systems and More Semiconductor Equipment |
C12: Semiconductor and High Tech Equipment |
C13: Semiconductor Equipment for Eight Inch (8”) Wafer Fab | Mass Flow Controller List | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Ion Implanter Parts & Services | Precision Fluid Pumps | Applied Materials Parts List | Equipment List | Lam Systems Parts List |Tegal Systems Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Hot List Sale | Advertise Worldwide Online
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