Semiconductor R&D Equipment, Furnaces, EPI Reactors, and Vacuum Systems - C1
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R&D Semiconductor Equipment . . . For Sale!!!
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
| Item
| Equipment
| Model
| Notes
| Voltage/Current
| Dimensions
|
| 1
| SK Vapor Dryer
| 51028
| IPA Dryer
| 240V/70A
| 45W X 24D X 100H
|
| 2
| AEP Stripper
| UC-7550
| Flat Panel Stripper
| 208V/200A
| 74W X 50D 94H
|
| 3
| O3 Detector
| IN 2000-3
| Ozone Monitor
| 120V/1.5A
| N/A
|
| 4
| Steag Wet Etch
| FPD-400
| Wet Etch with Robot
| 208V/60A
| 71W X 51L X 65H
|
| 5
| AKT RIE
| 1600-ETCH
| 2 Etch Chambers
| 208V/240A
| Cluster Tool
|
| 6
| AKT PVD
| 1600-PVD
| 2 Sputter Chambers
| 208V/320A
| Cluster Tool
|
| 7
| Steag Coater
| FPD 400
| Resist Coater/Developer
| 208V/175A
| 115W X 82D X 73H
|
| 8
| Tamarack
| T-300
| Photo Lithography Tool
| 208V/15A
| 67W X 59D X 103H
|
Furnaces or Thin Film Equipment
| Item
| Model/Description
| Qty
| Condition
|
| 1
| SVG 7000 TEOS System, 1993
| 1
| Excellent
|
| 2
| BTU Apogee +1 Oxide System
| 2
| New, In Crate
|
| 3
| Gemini II
| 1
| Rebuilt, No Generator
|
| 4
| Gemini II
| 1
| "As-Is", No Generator
|
| 5
| Gemini I
| 1
| "As-Is", Touch Screen, No Generator
|
| 6
| Gemini I
| 1
| "As-Is", No Generator
|
Mass Flow Controller Power Supply & Control Unit
| Item
| Manufacturer
| Model/Description
| Qty
| Condition
|
| 1
| Brooks Instruments
| 0152E
| 8
| Excellent
|
New Busch Vacuum Pumps
| Item
| Manufacturer
| Model/Description
| Qty
| Serial No.
| CFM
| Condition
|
| 1
| Busch
| BB0021, .9 KW, 13A, 110V, 1PH, 60 HZ
| 1
| C0019000142
| 21
| New, no box
|
| 2
| Busch
| BA0250, 7.5 KW, 220/380V, 28.4/16.4A, 3 PH, 60HZ
| 1
| PB03680101
| 250
| New in Box
|
Won't last. Call for highly motivating prices.
Major Components in Various Semiconductor Equipment
| Item
| Manufacturer
| Model/Description
| Qty
| Price/Ea
| Comments
|
| 1
| Advanced Energy
| MDX 10KW, Mod. No. 3152011-053P, Low-Z, Slave, Power Supply, S/N's: 115811 & 115812
| 2
| $6,500.00
| New, in boxes, SN 115812 SOLD
|
| 2
| Brooks Automation
| Eight inch (8") Vacuum Cassette Elevator, Type VCE-2-0, Assembly, ortogonal, 4 right hand & 4 left hand
| 8
| $8,500.00
| New
|
| 3
| CTI Cryogenics
| On-Board 8F Cryopump, Part No.: 8116021G001, S/N: PK9534124, Roughing Valve, Purge Valve: P/N 8112095; Input 40-80 PSI, VCR TC Gauge: P/N 8112105, Control Module
| 1
| $7,000.00
| New, in box, in plastic, with manual
|
| 4
| CTI Cryogenics
| On-Board 8F Cryopump, Part No.: 8116021G002, S/N: PF9637760, Fast Regen Control Sputtering Module PC2 87F9613888, POS 2 PF9637760, Roughing Valve, Purge Valve: P/N 8112095G001; Input 40-80 PSI, TC Gauge - VCR
| 1
| $6,500.00
| New, in box
|
| 5
| CTI Cryogenics
| On-Board 8 Waterpump, Part No.: 8120900, S/N: AF221829, Roughing Valve: P/N 8112085; Input 60-80 PSI, Purge Valve: P/N 8112095; Input 40-80 PSI TC Gauge - VCR: P/N 8112105, "W" Control Module
| 1
| $2,700.00
| No longer available
|
| 6
| CTI Cryogenics
| On-Board 8F High Vacuum Pump, P/N: 8112906G001, S/N: BH222268, Roughing Valve: P/N 8112197; Input 60-80 PSI, TC Gauge - VCR: P/N 8112105
| 1
| $2,300.00
| No longer available
|
| 7
| CTI Cryogenics
| On-Board 8 Cryopump, P/N: 8112-856, S/N: AJ9120804, Purge Valve: P/N 8112095, Input 40-80 PSI, Control Module,
| 1
| $2,000.00
| No longer available
|
| 8
| CTI Cryogenics
| On-Board Cryopump, P/N: 8112-856, S/N: AE120035, Roughing Valve: P/N 8112085, Input 60-80 PSI; Purge Valve: P/N 8112095, Input 40-80 PSI, Control Module,
| 1
| $2,000.00
| No longer available
|
| 9
| CTI Cryogenics
| On-Board Series Network Interface Terminal, P/N: 8113022G002, S/N: 74G920214
| 1
| $500.00
| Used, no box, no manual
|
| 10
| Emcor Products, Crenlo, Inc.
| Emcor 10 Series vertical electronic enclosures, 19-1/16" panel width x 26-5/16" depth x 70-1/8" vertical opening height
| 8
| $500.00
| New, in boxes
|
| 11
| Emcor Products, Crenlo, Inc.
| Emcor 10 Series vertical electronic enclosures, 24-1/16" panel width x 31-9/16" depth x 70-1/8" vertical opening height
| 8
| $600.00
| New, in boxes
|
| 12
| Leybold
| Turbo Vac Pump, Model 89489
| 1
| $4,000.00
| No longer available
|
| 13
| Osaka Vacuum
| Model TC 440 Power Supply, S/N's: A106515-5, A106515-6, A050520-19, & A101711-20
| 4
| $1,250.00
| All new, in box, with manual
|
| 14
| Osaka Vacuum
| Model TC 440 Power Supply, S/N A096822-27
| 1
| $1,250.00
| New, in box, no manual
|
| 15
| Osaka Vacuum
| Model TC 440 Power Supply, S/N AD56084-12
| 1
| $500.00
| Used, no box
|
| 16
| Pfeiffer Balzers
| Type TPU 450 H Pump, DN 160 C F-F, PM P01 770/P341B
| 1
| $2,800.00
| No longer available
|
| 17
| Pfeiffer Balzers
| Type TPH 060 Pump, DN 63 ISO-K, PM P01 400/M3275
| 1
| $1,250.00
| No longer available >
|
| 18
| Pfeiffer Balzers
| Type TPH 060 Pump, DN 63 ISO-K, PM P01 400/M1588
| 1
| $1,250.00
| No longer available
|
| 19
| Pfeiffer Balzers
| Type TPH 060 Pump, DN 63 ISO-K, PM P02 090/P317
| 1
| $1,250.00
| No longer available
|
| 20
| Seiko-Seiki
| Model No. STP-H1000C 0411
| 1
| $Call
| Like new, no box, no manual
|
| 21
| RF Power Products
| LF10, 1000 watt, 50-460 KHz Variable Frequency RF Generator, Model 7520426015 LF10 SE 134, S/N L1946
| 1
| $4,000.00
| New, in box
|
| 22
| RF Power Products
| RF5S, 500 watt, 13.56 MHz RF Generator, S/N S1296-10434
| 1
| $2,000.00
| No longer available
|
| 23
| VAT
| Series 20 Vatterfly Valve, Manual Actuator, Double acting pneumatic actuator, Model DN 63-160 (I.D. 2-1/2" - 6")
| 5
| $1,200.00
| New, in boxes, sealed in plastic, with manuals
|
| 24
| VAT
| Series 20 Vatterfly Valve, Manual Actuator, Double acting pneumatic actuator, Model DN 63-160 (I.D. 2-1/2" - 6")- S/N F20-83298/0059, File No. 20044-PA24-1006
| 5
| $1,200.00
| New, in boxes, sealed in plastic, with manuals
|
| 25
| VAT
| Series 20 Vatterfly Valve, Manual Actuator, Double acting pneumatic actuator, Model DN 63-160 (I.D. 2-1/2" - 6")- S/N F20-83298/0052, File No. 20044-PA24-1006
| 1
| $1,000.00
| Like new, in box, not sealed in plastic, with manual
|
| 26
| VAT
| Series 02, Rectangular Gate Valve MONOVAT, Double acting pneumatic actuator, S/N F02-106361/82, File No. 02010-BA24-1008, 1997
| 1
| $1,800.00
| New, in box, sealed in plastic, with manual, SOLD
|
| 27
| VAT
| Series 02, Rectangular Gate Valve MONOVAT, Double acting pneumatic actuator, S/N F02-75092/1, File No. 02010-AA24-X, 1997
| 1
| $2,000.00
| New, in box, sealed in plastic, with manual
|
| 28
| VAT
| S/N F02-106361/90, File No. 02010-BA24-1008, 1997
| 1
| $750.00
| Like new, not in box, sealed in plastic, no manual, SOLD
|
| 29
| VAT
| S/N F02-84060/0003, File No. 02010-AA24-1006, 1995
| 1
| $450.00
| Like new, in box, no manual
|
| 30
| VAT
| S/N F02-86358/0068, File No. 02010-BA24-1008, 1996
| 1
| $450.00
| No longer available
|
| 31
| VAT
| S/N F02-84887/0019, File No. 02010-BA24-1008, 1995
| 1
| $450.00
| No longer available
|
| 32
| VAT
| S/N F02-79433/0014, File No. 02010-CA24-1002, 1995
| 1
| $450.00
| Used
|
| 33
| VAT
| Model VF3243
| 1
| $200.00
| Used
|
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C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System |
C11: R&D Vacuum Systems and More Semiconductor Equipment |
C12: Semiconductor and High Tech Equipment |
C13: Semiconductor Equipment for Eight Inch (8”) Wafer Fab | Mass Flow Controller List | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Ion Implanter Parts & Services | Precision Fluid Pumps | Applied Materials Parts List | Equipment List | Lam Systems Parts List |Tegal Systems Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Hot List Sale | Advertise Worldwide Online
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